Cluster System
Cluster sputtering is a highly flexible R&D and pilot system that configures multiple processes in a single vacuum environment.
- OLED Panel and material development systems
- Efficient and long-life panel production through deposition/encapsulation in ultra-high vacuum
- High efficiency and long life due to proper cleaning and removing out-gassing methods
Applications
- OLED Display Panel Productions
- OLED Display Research/Development
- OLED Material development
Specifications
| Configurations | Plasma Treatment, Organic/Meal deposition, Encapsulation unit |
|---|---|
| Features | Source auto-feeding unit, Auto aligner unit |
| Source | Point source, Linear source |