Inline System
Inline sputtering system delivers high uptime and uniform thin-film quality in mass production through a fully automated, continuous process.
- Highly productive inline system (moves the substrate during the deposition process)
- Optimized OLED lighting panel production
Specifications
| Deposition Type | In-Line Horizontal Type |
|---|---|
| Substrate Size | Mass : ~ Gen.5.5 R&D ~ P/P : ~ Gen.2 |
| Evaporation Source | Mass : Linear Source R&D ~ P/P : Parallel Shot by Point Source |
| Tact Time | Mass : 2mins R&D ~ P/P : 30mins |
| Thickness Uniformity | Organic : ≤± 3%(Organic), ≤± 4%(Metal) |
| Align Accuracy | Mechanical Align : ≤± 150㎛ |