Sputtering system
Built on proprietary thin-film control technology, Selcos's diverse vacuum deposition systems ensure precise process execution and reliable operational stability.
Inline Sputter
An inline sputtering system engineered for high-speed, continuous production of large-area substrates. Its seamless linear process flow achieves maximum production efficiency and uniform thin-film quality for high-volume manufacturing lines.
Cluster Sputter
A cluster-type sputtering system designed for ultra-precision multi-layer thin film formation in semiconductor and OLED manufacturing. By arranging independent chambers around a central robot, it prevents substrate contamination and maximizes the flexibility of complex processes.
Batch Sputter
A batch-type sputtering system, the optimized solution for high-mix low-volume production and R&D. It processes multiple substrates simultaneously within a single cycle, offering superior space efficiency and economical operating costs.