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Inline Sputter
Inline sputtering is a fully automated continuous process that achieves high throughput and consistent film quality in mass production.
- Fully Automated System, Various technology ensures stable quality and provides expandability
- Offers high mobility and maximizes productivity
Applications
- Applicable to various thin film (Metal, Oxide, TCO) process
- Applicable to various products (Plastic, Glass, etc.)
- Applicable to various shapes (Deco, Tool, Special model)
Specifications
| Configuration | Loading, Pre-treatment, Deposition, Buffer, Unloading |
|---|---|
| Tact time | 3 min |
| Cathode | Planar or Cylindrical Magnetron cathode |
| Target | Metal, Oxide, TCO |