Inline System
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Products OLED Evaporation System Inline System
▷ Highly productive inline system (moves the substrate during the deposition process)
▷ Optimized OLED lighting panel production
Specifications
| Deposition Type | Inline Horizontal Type |
| Substrate Size | Mass : ~ Gen.5.5 R&D ~ P/P : ~ Gen.2 |
| Tact Time | Mass : 2mins R&D ~ P/P : 30mins |
| Evaporation Source | Mass : Linear Source R&D ~ P/P : Parallel Shot by Point Source |
| Thickness Uniformity | Organic : ≤± 3%(Organic), ≤± 4%(Metal) |
| Align Accuracy | Mechanical Align : ≤± 150㎛ |