Batch Sputter

  • Inline batch
  • Inline batch

▷ Suitable system for R&D due to various thin-film deposition systems available

Applications
- Integrated optical devices and electronic components
- Hardness Coating
Specifications
Configuration Pre-treatment, Deposition
Features Drum type, Dual-side deposition
Cathode Planar Magnetron cathode
Target Metal, Oxide, TCO